SATS IRIS Reticle Shuffler

A modern, modular reticle handling platform for 200mm and 300mm fabs — built to your specifications, supported for the long haul.

Precision AutomationClass 1 Cleanroom ReadyFully Configurable200mm & 300mm Compatible

The Challenge: Legacy Tools Are Holding Fabs Back

What we're hearing from the field

Legacy Brooks / Zygo ZARIS shufflers are aging out of support across both 200mm and 300mm fabs

OEM platforms are rigid — modifications are costly or impossible

Spare parts are scarce, lead times are long

Downtime risk grows every year the tool stays in the field

The bottom line

Reticle handling is a critical link in the lithography loop for both 200mm and 300mm fabs. Fabs need a path forward — not a workaround.

Introducing IRIS

A SATS custom-engineered reticle shuffler — built from the ground up as a modern, capable replacement for legacy platforms.

Our Design. Our IP.

Not an OEM resell. IRIS is a SATS original — giving us full freedom to adapt it to your exact workflow.

Intuitive Operation

Touchscreen GUI, automated sequencing, and smart ID verification — from day one.

Class 1 Clean

ULPA filtration, de-ionization, and mini-environment design maintain better than ISO Class 3 conditions.

At-a-Glance Capabilities

30µm

Handling Repeatability

Precision placement every cycle

3x

Reticle Indexers

Triple indexers for high throughput

6-axis

Contemporary Robot

Full articulation with custom EOAT

ISO 3

Clean Environment

Better than ISO Class 3, continuously maintained

Engineering Architecture

6-Axis Robot

Contemporary platform with custom EOAT — torque and strain sensing for collision detection

Triple NRI Indexers

DC servo-controlled, 31.8 mm/sec, protrusion detection, reticle mapping, quick-disconnect assembly

Automated ID Verification

Fast, accurate barcode reading integrated into every transfer cycle

Safety Architecture

EMO, machine pause, crash detection — designed to protect reticles and personnel

Touchscreen GUI

Intuitive operator interface with pod-to-pod relocation and onboarding workflows

Modular by Design

IRIS ships in a powerful base configuration — and expands cleanly when you need more.

Automated Pod Opener

Integrated pod cracker / opener concept ready for incoming reticle ports — available when you need it

Bright-Light Particle Inspection

Optional inline inspection module with image capture for particle and contamination detection

Blow-Off Station

Reticle surface cleaning module — configurable as part of the transfer sequence

Backside Pellicle Inspection

Image capture for backside and pellicle review — fully integrated, no manual handling required

Built Around Your Requirements

Why our design model matters

Because IRIS is our own IP, we are not constrained by a fixed OEM architecture. We work with you to understand your exact workflow, interfaces, and pod configuration — then we build to match.

  • Custom port count and layout
  • Interface to your factory host or MES
  • GEM/SECS integration available
  • Reticle format and SMIF pod flexibility
  • 200mm and 300mm fab compatibility

Our process

No long OEM change-request cycles. We move at the speed your fab needs.

An Expandable Automation Platform

IRIS is designed with growth in mind — today's shuffler becomes tomorrow's stocker-integrated automation node.

1

Base Configuration

3-port pod-to-pod reticle shuffler with full ID verification and Class 1 clean operation

2

Value-Added Modules

Add pod opener, particle inspection, blow-off, and pellicle imaging as needed

3

Stocker / EFEM Integration

Architecture supports future integration with reticle stockers and EFEM-style automation cells

4

Full Fab Automation

Scale toward a fully automated, host-connected reticle management ecosystem

Beyond the Tool: Your Lifecycle Partner

We support IRIS from first install to end of life

Repair Loop Setup

We help establish and support your reticle handling repair process

Parts Refurbishment

Worn components restored to spec — cost-effective alternative to new OEM parts

Parts Sales

Stocked consumables and critical spares to minimize downtime

Long-Term Support

Engineering support and field service — available for the life of the tool

Built by Engineers. Backed by Decades of Fab Experience.

Our Foundation

  • Founded in direct response to customer demand for modern, production-ready automation equipment.
  • Built by engineers with decades of real-world fab experience — understanding exact fab needs.
  • A wholly owned subsidiary of Van Der Geest Enterprises, Inc. (VDGE), a leader in semiconductor manufacturing support.

Why this matters for you

IRIS is a product of this deep expertise — not an OEM resell, but original engineering purpose-built for the complex reticle handling challenge. We are focused on delivering tools that integrate seamlessly into active fabs without disrupting critical production.

Ready to Move Forward?

IRIS is available now. Whether you need a direct replacement for a legacy shuffler or a configurable platform built to your specs — we are ready to talk.

Request a Demo

See IRIS in action and ask our engineers your toughest questions

Share Your Requirements

Tell us your workflow, pod config, and integration needs — we will build to match

Talk Lifecycle Support

Let us show you what a true long-term automation partner looks like

Contact us: [email protected] | www.satsvcs.com