SATS IRIS Reticle Shuffler
A modern, modular reticle handling platform for 200mm and 300mm fabs — built to your specifications, supported for the long haul.
Precision Automation
Class 1 Cleanroom Ready
Fully Configurable
200mm & 300mm Compatible
The Challenge: Legacy Tools Are Holding Fabs Back
What we're hearing from the field
Legacy Brooks / Zygo ZARIS shufflers are aging out of support across both 200mm and 300mm fabs
OEM platforms are rigid — modifications are costly or impossible
Spare parts are scarce, lead times are long
Downtime risk grows every year the tool stays in the field
The bottom line
Reticle handling is a critical link in the lithography loop for both 200mm and 300mm fabs. Fabs need a path forward — not a workaround.

IRIS was designed specifically to close this gap.
Introducing IRIS
A SATS custom-engineered reticle shuffler — built from the ground up as a modern, capable replacement for legacy platforms.
Our Design. Our IP.
Not an OEM resell. IRIS is a SATS original — giving us full freedom to adapt it to your exact workflow.
Intuitive Operation
Touchscreen GUI, automated sequencing, and smart ID verification — from day one.
Class 1 Clean
ULPA filtration, de-ionization, and mini-environment design maintain better than ISO Class 3 conditions.
At-a-Glance Capabilities
30µm
Handling Repeatability
Precision placement every cycle
3x
Reticle Indexers
Triple indexers for high throughput
6-axis
Contemporary Robot
Full articulation with custom EOAT
ISO 3
Clean Environment
Better than ISO Class 3, continuously maintained
Engineering Architecture
6-Axis Robot
Contemporary platform with custom EOAT — torque and strain sensing for collision detection
Triple NRI Indexers
DC servo-controlled, 31.8 mm/sec, protrusion detection, reticle mapping, quick-disconnect assembly
Automated ID Verification
Fast, accurate barcode reading integrated into every transfer cycle
Safety Architecture
EMO, machine pause, crash detection — designed to protect reticles and personnel
Touchscreen GUI
Intuitive operator interface with pod-to-pod relocation and onboarding workflows
Modular by Design
IRIS ships in a powerful base configuration — and expands cleanly when you need more.
Automated Pod Opener
Integrated pod cracker / opener concept ready for incoming reticle ports — available when you need it
Bright-Light Particle Inspection
Optional inline inspection module with image capture for particle and contamination detection
Blow-Off Station
Reticle surface cleaning module — configurable as part of the transfer sequence
Backside Pellicle Inspection
Image capture for backside and pellicle review — fully integrated, no manual handling required

Every module is an add-on to the core platform — not a redesign. Mix and match to match your exact process needs.
Built Around Your Requirements
Why our design model matters
Because IRIS is our own IP, we are not constrained by a fixed OEM architecture. We work with you to understand your exact workflow, interfaces, and pod configuration — then we build to match.
  • Custom port count and layout
  • Interface to your factory host or MES
  • GEM/SECS integration available
  • Reticle format and SMIF pod flexibility
  • 200mm and 300mm fab compatibility
Our process
No long OEM change-request cycles. We move at the speed your fab needs.
An Expandable Automation Platform
IRIS is designed with growth in mind — today's shuffler becomes tomorrow's stocker-integrated automation node.
1
Base Configuration
3-port pod-to-pod reticle shuffler with full ID verification and Class 1 clean operation
2
Value-Added Modules
Add pod opener, particle inspection, blow-off, and pellicle imaging as needed
3
Stocker / EFEM Integration
Architecture supports future integration with reticle stockers and EFEM-style automation cells
4
Full Fab Automation
Scale toward a fully automated, host-connected reticle management ecosystem
Beyond the Tool: Your Lifecycle Partner
We support IRIS from first install to end of life
Repair Loop Setup
We help establish and support your reticle handling repair process
Parts Refurbishment
Worn components restored to spec — cost-effective alternative to new OEM parts
Parts Sales
Stocked consumables and critical spares to minimize downtime
Long-Term Support
Engineering support and field service — available for the life of the tool
Built by Engineers. Backed by Decades of Fab Experience.
Our Foundation
  • Founded in direct response to customer demand for modern, production-ready automation equipment.
  • Built by engineers with decades of real-world fab experience — understanding exact fab needs.
  • A wholly owned subsidiary of Van Der Geest Enterprises, Inc. (VDGE), a leader in semiconductor manufacturing support.
Why this matters for you
IRIS is a product of this deep expertise — not an OEM resell, but original engineering purpose-built for the complex reticle handling challenge. We are focused on delivering tools that integrate seamlessly into active fabs without disrupting critical production.

Trust in SATS means investing in proven expertise and long-term partnership.
Ready to Move Forward?
IRIS is available now. Whether you need a direct replacement for a legacy shuffler or a configurable platform built to your specs — we are ready to talk.
Request a Demo
See IRIS in action and ask our engineers your toughest questions
Share Your Requirements
Tell us your workflow, pod config, and integration needs — we will build to match
Talk Lifecycle Support
Let us show you what a true long-term automation partner looks like

SATS — Semiconductor Automation & Technology Solutions. Precision-built. Fully supported. Ready for your fab. | www.satsvcs.com
Contact us: [email protected] | www.satsvcs.com